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		<title>成本 on Efficient Indoor IR Heating</title>
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				<title>红外线晶圆加热灯的成本</title>
				<link>http://indoor-ir-heat.com/zh/posts/cost-of-infrared-wafer-heater-lamp/</link>
				<pubDate>Sun, 31 May 2026 04:55:55 +0800</pubDate>
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				<description>&lt;p&gt;&lt;img src=&#34;http://indoor-ir-heat.com/images/016cf4f616aaa15e4af48856b8adc51b.png&#34; alt=&#34;红外线晶圆加热灯的成本&#34;&gt;&lt;/p&gt;&#xA;&lt;p&gt;在光刻车间，时间不是以分钟计量，而是以良率计量。晶圆进入工艺线，光刻胶被涂布，软烘烤必须在极为严格的时间窗口内完成，以确保线宽变化符合规格。若烘烤曲线偏移，或出现热点，线路尺寸就会偏移。热预算没有重来的机会。&lt;/p&gt;</description>
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